Thiết bị đo lưu lượng khí gas EL-FLOW Prestige | Bronkhorst Viet Nam

Data sheet EL-FLOW Prestige

Technical specifications

Measurement / control system

Accuracy (incl. linearity) : standard: ±0,5% Rd plus ±0,1% FS

(based on actual calibration, (±0,8% Rd plus ±0,2% FS for ranges 3...5 mln/min;

according SEMI E69) ±1% Rd plus ±1% FS for ranges < 3 mln/min)

Repeatability : 0-20% < ± 0,04% FS;

 20-100% < ± 0,2% Rd

Turndown : 1:150; in analog mode 1:50

Multi Gas/Multi Range gases : embedded gas data for 100 unique gases

 (see FAQ section on our website) plus any mixture

 of maximum 5 of these gases.

Settling time : fast: < 500 msec

 standard: < 1 sec

 slow: < 2 sec

Operating temperature : -10…70°C

Temperature sensitivity : zero: < 0,02% FS/°C; span: < 0,025% Rd/°C

Pressure sensitivity : standard: < 0,15% Rd/bar typical N2;

 with pressure correction: < 0,02% Rd typical N2

Accuracy of integrated

pressure sensor (PI option) : ± 0,25% FS at ambient temperature

Leak integrity, outboard : tested < 2 x 10-9 mbar l/s He

Attitude sensitivity : max. error at 90º off horizontal 0,07% FS

 at 1 bar, typical N2

Warm-up time : 30 min. for optimum accuracy

Mechanical parts

Material (wetted parts) : stainless steel 316L or comparable,

 degreased for use on oxygen (O2)

Process connections : compression type or face seal couplings

Seals : standard: Viton®;

 options: EPDM, Kalrez® (FFKM),

 FDA and USP Class VI approved compounds

 (model FG-201CS excluded)

Electrical properties

Power supply : +15…24 Vdc

Max. power consumption (controllers based on normally closed valve, pin 5 not used) :

 Supply at voltage I/O at current I/O

 Meter 15 V 69 mA 92 mA

 24 V 45 mA 63 mA

 Controller 15 V 202 mA 225 mA

 24 V 128 mA 146 mA

If applicable: PROFIBUS DP add 53 mA (15 V supply) or 30 mA (24 V supply)

 PROFINET add 76 mA (15 V supply) or 48 mA (24 V supply)

 EtherCAT® add 66 mA (15 V supply) or 41 mA (24 V supply)

 DeviceNet™ add 48 mA (24 V supply)

Analog output/command : 0...5 (10) Vdc or 0 (4)…20 mA (sourcing output)

Digital communication : standard: RS232;

 options: PROFIBUS DP, DeviceNet™, PROFINET,

 EtherCAT®, Modbus RTU or ASCII, FLOW-BUS

Electrical connection

Analog/RS232 : 9-pin D-connector (male);

PROFIBUS DP : bus: 9-pin D-connector (female);

 power: 9-pin D-connector (male);

DeviceNet™ : 5-pin M12-connector (male);

EtherCAT®/PROFINET : 2 x RJ45 modular jack (in/out)

Modbus/FLOW-BUS : RJ45 modular jack

CE : EMC 2014/30/EU, RoHS 2011/65/EU,

IEC 61010-1 : 2010

Ingress protection (housing) : IP40